John N. Helbert (editor) <br/><br/>
Handbook of VLSI microlithography  principles, tools, technology and applications 

 - Delhi  JAICO Publishing House  2005 
 - xix, 957 p.  : ill.  ; 24 cm. 
<br/><br/><label>ISBN: </label>8179924750 (hb) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits-Very large scale integrated <br/>Microlithography--Resist technology-Design processing--Implementation of strategy--Lithography process--Rational vibration--Photo metrology--FEAS--FC
<br/><br/><label>Dewey Class. No.: </label>621.381531  / HAN