00543nam a22001097a 4500020002000000082002000020100002900040245008600069260004000155300003400195650020400229  a8179924750 (hb)  a621.381531bHAN  aJohn N. Helbert (editor)  aHandbook of VLSI microlithographybprinciples, tools, technology and applications  aDelhibJAICO Publishing Housec2005  axix, 957 p.b: ill.c; 24 cm.  aIntegrated circuits-Very large scale integrated aMicrolithographyvResist technology-Design processingvImplementation of strategyvLithography processvRational vibrationvPhoto metrologyvFEASvFC