TY  - BOOK
AU  - John N. Helbert (editor)
TI  - Handbook of VLSI microlithography: principles, tools, technology and applications
SN  - 8179924750 (hb)
U1  - 621.381531 
PY  - 2005///
CY  - Delhi
PB  - JAICO Publishing House
KW  - Integrated circuits-Very large scale integrated
KW  - Microlithography
KW  - Resist technology-Design processing
KW  - Implementation of strategy
KW  - Lithography process
KW  - Rational vibration
KW  - Photo metrology
KW  - FEAS
KW  - FC
ER  -