TY  - BOOK
AU  - Saqib Sardar (35651)
TI  - Two dimensional fluid simulation of SiH4/H2 capacitive coupled plasma: investigation of temperature dependent behavior 
U1  - 530 
PY  - 2024///
CY  - Islamabad
PB  - (unpublished)
KW  - Physics
KW  - Reactor geometry
KW  - Numerical model
KW  - Density variation
KW  - Plasma
KW  - DBS
KW  - FEAS
N1  - A dissertation submitted in the partial fulfillment of the requirements for the degree of Master of Philosophy in Physics Department of Basic Sciences; Includes bibliographical references; Thesis supervisor: Dr. Muhammad Waqar Ahmed; Thesis (M.Phil.)--Riphah International University, 2024
ER  -