@book{56102,
	author = {Zobia Naeem (41282)},
	title = {Computational analysis of SiH2 and SiH3 dynamics in SiH4/H2 capacitive coupled plasma },
	publisher = {(unpublished)},
	year = {2024},
	address = {Islamabad},
	note = {A dissertation submitted in the partial fulfillment of the requirements for the degree of Master of Philosophy in Physics Department of Basic Sciences.}
}