00800nam a22001697a 4500040003600000082001300036100002400049245009100073260003500164300003500199500015600234500004000390500004800430502006000478546001200538650008000550  cRiphah International University  a530bZOB  aZobia Naeem (41282)  aComputational analysis of SiH2 and SiH3 dynamics in SiH4/H2 capacitive coupled plasma   aIslamabadb(unpublished)c2024  a, 28 p.b: ill.c; 30 cm.e+CD  aA dissertation submitted in the partial fulfillment of the requirements for the degree of Master of Philosophy in Physics Department of Basic Sciences.  aIncludes bibliographical references  aThesis supervisor: Dr. Muhammad Waqar Ahmed  aThesis (M.Phil.)--Riphah International University, 2024  aEnglish  aPhysics vReactor dynamicvEnergy modelvFluid modelvFlow chartvDBSvFEAS