<?xml version="1.0" encoding="UTF-8"?>
<mods xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3" version="3.1" xsi:schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-1.xsd">
  <titleInfo>
    <title>Two-dimensional fluid simulation study of SiH4/H2 capacitive coupled plasma</title>
    <subTitle>pressure-dependent behavior of SiH+, SiH2, SiH2+ and SiH4 densities</subTitle>
  </titleInfo>
  <name type="personal">
    <namePart>Syed Muhammad Mustafain Alvi (106)</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
  </name>
  <typeOfResource>text</typeOfResource>
  <originInfo>
    <place>
      <placeTerm type="text">Islamabad</placeTerm>
    </place>
    <publisher>(Unpublished)</publisher>
    <dateIssued>2025</dateIssued>
    <issuance>monographic</issuance>
  </originInfo>
  <physicalDescription>
    <extent>xiii , 48 p.  : ill , Col. ; 30 cm. +CD</extent>
  </physicalDescription>
  <note>Submitted in partial fulfillment of the requirements for the degree of Master of Philosophy in Physics to the Department of Basic Sciences.</note>
  <note>Includes bibliographical references.</note>
  <note>Thesis supervisor: Dr.  Muhammad Waqar Ahmed </note>
  <note>Thesis (M.Phil)--Riphah International University, 2025</note>
  <note>English</note>
  <subject>
    <topic>Physics</topic>
    <topic>Pressure dependent</topic>
    <topic>Fluid simulation</topic>
    <topic>Coupled plasma</topic>
    <topic>SiH4/H2</topic>
    <topic>DBS</topic>
    <topic>FEAS</topic>
  </subject>
  <classification authority="ddc">530 MUS</classification>
  <recordInfo>
    <recordContentSource authority="marcorg"/>
  </recordInfo>
</mods>
