TY - BOOK AU - Syed Muhammad Mustafain Alvi (106) TI - Two-dimensional fluid simulation study of SiH4/H2 capacitive coupled plasma: pressure-dependent behavior of SiH+, SiH2, SiH2+ and SiH4 densities U1 - 530 PY - 2025/// CY - Islamabad PB - (Unpublished) KW - Physics KW - Pressure dependent KW - Fluid simulation KW - Coupled plasma KW - SiH4/H2 KW - DBS KW - FEAS N1 - Submitted in partial fulfillment of the requirements for the degree of Master of Philosophy in Physics to the Department of Basic Sciences; Includes bibliographical references; Thesis supervisor: Dr. Muhammad Waqar Ahmed; Thesis (M.Phil)--Riphah International University, 2025 ER -