TY  - BOOK
AU  - S. M. Sze (editor)
TI  - VLSI technology
SN  - 9780070582910 (pbk)
U1  - 621.395 
PY  - 2003///
CY  - New Delhi
PB  - The McGraw-Hill companies
KW  - Electrical engineering
KW  - Integrated circuit
KW  - Wafer preparation
KW  - Crystal growing
KW  - Plasma etching
KW  - Metallization applications
KW  - Atomic diffusion
KW  - Process simulation
KW  - Process integration
KW  - Analytical techniques
KW  - Assembly techniques
KW  - VLSI devices
KW  - Diffusion
KW  - FEAS
N1  - Includes index
ER  -