000			00606cam a22001454a 4500
020			_a978812033752 (pbk)
082	0	0	_a621.381 _bMEM
100			_aP. Rai-Choudhury (Editor)
245	0	0	_aMEMS and MOEMS technology and applications
260			_aNew Delhi _bPHI Learning Private Limited _c2009
300			_axi, 520 p. _b: ill. _c; 24 cm.
500			_aIncludes bibliographic references and index.
650		0	_aMicroelectromechanical systems _vOptical communications network _vOptoelectronic devices _vOptical microsystem _vCMOS fabrication _vOptical waveguides _vMicromachines _vMEMS _vMOMS _vFEAS
942			_cBK
999			_c14620 _d14620