000 00664cam a22001694a 4500
020 _a0819459771 (hb)
020 _a9780819459779 (hb)
082 0 0 _a610.28
_bSAL
100 1 _aSaliterman, Steven S.
245 1 0 _aFundamentals of bioMEMS and medical microdevices
246 3 0 _aBioMEMS and medical microdevices
260 _aWashington
_bSPIE
_c2006
300 _axxvii, 610 p.
_b: ill.
_c; 26 cm.
500 _aIncludes glossary, appendices, bibliographical references and index.
650 0 _aNanotechnology
_vBiotechnology
_vNanoscience
_vBioMEMS
_vMicro-electronics
_vMolecular technology
_vNanoscale technology
_vMicroelectromechanical systems
_vFEAS
942 _cBK
999 _c19945
_d19945