| 000 | 00559nam a22001577a 4500 | ||
|---|---|---|---|
| 020 | _a9780750305457 (pbk) | ||
| 082 |
_a530.44 _bROT |
||
| 100 | _aRoth, J Reece | ||
| 245 | _aIndustrial plasma engineering | ||
| 260 |
_aBristol _bInstitute of Physics Publishing _c2001 |
||
| 300 |
_axi, 645 p. _b: ill. _c; 23 cm. |
||
| 500 | _aIncludes appendix and index. | ||
| 505 | _aVolume 2. | ||
| 650 |
_aPlasma engineering _aPhysics _vKinetic theory-Gases _vElectron sources-Beams _vIon sources-Beams _vVacuum plasma sources _vPlasma etching _vPlasma _vRICAS |
||
| 942 | _cREF | ||
| 999 |
_c23769 _d23769 |
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