000			00607nam a2200157 4500
999			_c24229 _d24229
020			_a9789381269534 (pbk)
082			_a530.4175 _bOHR
100			_aOhring, Milton
245			_aMaterials science of thin films _bdeposition and structure
260			_aAmsterdam _bElsevier _c2015
300			_axxi, 794 p. _b: ill. _c; 23 cm.
500			_aIncludes references, appendix and index.
650			_aPhysics _aThin films _vIon-Surface interactions _vMaterials science-Thin films _vVacuum science _vEvaporation processes _vMaterial science _vPlasma interactions _vFilm-Structure _vRICAS
942			_cBK