000			00651nam a22001577a 4500
999			_c24480 _d24480
020			_a9780387095110 (pbk)
020			_a9788132206637 (pbk)
082			_a621.381 _bADA
100			_aAdams, Thomas M. _aRichard A. Layton
245			_aIntroductory MEMS _bfabrication and applications
260			_aNew Delhi _bSpringer _c2012
300			_axv, 444 p. _b: ill. _c; 23 cm.
500			_aIncludes appendix and index.
650			_aPhysics _aMicroelectromechanical systems _vElectronic apparatus _vMicrofabrication lab _vSystems engineering _vSolid Mechanics _vSilicon growth _vTransducers _vMicrofluidics _vElectronics _vSurfaces _vMaterials _vRICAS
942			_cBK