000			00526nam a22001337a 4500
999			_c27629 _d27629
082			_a621.38152 _bGRO
100			_aGrove, A. S.
245			_aPhysics and technology of semiconductors devices
260			_aNew York _bJohn Wiley & Sons, Inc. _c1967
300			_axviii, 366 p. _b: ill. _c; 26 cm.
500			_aIncludes references and index.
650			_aPhysics _aSemiconductors _vSolid-State diffusion _vSemiconductor devices _vJunction transistors _vThermal Oxidation _vPlanar technology _vTechnology _vInsulator _vRICAS
942			_cBK