000			00521nam a22001577a 4500
020			_a0071141057 (pbk)
020			_a0070630023
082			_a621.381 _bULS
100			_aC. Y. Chang (editor) _aS. M. Sze (editor)
245			_aUSLI Technology
260			_aSingapore _bMcGraw-Hill _c1996
300			_axxv, 726 p. _b: ill. _c; 23 cm.
500			_aIncludes index.
650			_aElectronics _aElectronics--Integrated circuits _vCleanroom technology _vWafer-Cleaning technology _vEpitaxy _vEtching _vLithography _vFEAS
942			_cBK
999			_c2776 _d2776