| 000 | 00873nam a22001937a 4500 | ||
|---|---|---|---|
| 999 |
_c46608 _d46608 |
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| 040 | _cRiphah International University | ||
| 082 |
_a530 _bZAI |
||
| 100 | _aMuhammad Zaid (1134) | ||
| 245 | _aSimulation of Si2Hx density in SiH4/H2 capactive couple plasma | ||
| 260 |
_aIslamabad _b(Unpublished) _c2022 |
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| 300 |
_axiii, 59 p. _b: ill. Col. _c; 30 cm. _e+CD |
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| 500 | _aSubmitted in partial fulfillment of the requirements for the degree of Master of Philosophy in Physics to the Department of Basic Sciences. | ||
| 500 | _aIncludes bibliographical references. | ||
| 500 | _aThesis supervisor: Dr. Muhammad Waqar | ||
| 502 | _aThesis (M.Phil)--Riphah International University, 2022 | ||
| 546 | _aEnglish | ||
| 650 |
_aPhysics _vCapacitive couple plasma (CCP) _vInductive couple plasma (ICP) _vPlasma simulation models _vPlasma classificaions _vDBS _vFEAS |
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| 942 | _cTH | ||