| 000 | 00534pam a2200145 a 4500 | ||
|---|---|---|---|
| 999 |
_c51377 _d51377 |
||
| 020 | _a0803104030 (hb) | ||
| 082 | 0 | 0 |
_a621.38152 _bSEM |
| 100 | _aD. C. Gupta | ||
| 245 | 0 | 0 |
_aSemiconductor processing _b: a symposium |
| 260 |
_aPhiladelphia _bASTM _c1984 |
||
| 300 |
_a671 p. _b: ill. _c; 24 cm. |
||
| 500 | _aIncludes appendix and index. | ||
| 650 | 0 |
_aSemiconductor industry _vVLSI structure _vGain variation _vSemiconductor quality _vElectromagnetic rdiation _vMicrophone _vNeutron transmulation _vSillicon productiob _vRICAS |
|
| 942 | _cBK | ||