000 00534pam a2200145 a 4500
999 _c51377
_d51377
020 _a0803104030 (hb)
082 0 0 _a621.38152
_bSEM
100 _aD. C. Gupta
245 0 0 _aSemiconductor processing
_b: a symposium
260 _aPhiladelphia
_bASTM
_c1984
300 _a671 p.
_b: ill.
_c; 24 cm.
500 _aIncludes appendix and index.
650 0 _aSemiconductor industry
_vVLSI structure
_vGain variation
_vSemiconductor quality
_vElectromagnetic rdiation
_vMicrophone
_vNeutron transmulation
_vSillicon productiob
_vRICAS
942 _cBK