000			00589nam a22001337a 4500
999			_c5269 _d5269
020			_a8179924750 (hb)
082			_a621.381531 _bHAN
100			_aJohn N. Helbert (editor)
245			_aHandbook of VLSI microlithography _bprinciples, tools, technology and applications
260			_aDelhi _bJAICO Publishing House _c2005
300			_axix, 957 p. _b: ill. _c; 24 cm.
650			_aIntegrated circuits-Very large scale integrated _aMicrolithography _vResist technology-Design processing _vImplementation of strategy _vLithography process _vRational vibration _vPhoto metrology _vFEAS _vFC
942			_cBK