000 00888nam a22001937a 4500
999 _c55519
_d55519
040 _cRiphah International University
082 _a530
_bSAQ
100 _aSaqib Sardar (35651)
245 _aTwo dimensional fluid simulation of SiH4/H2 capacitive coupled plasma
_binvestigation of temperature dependent behavior
260 _aIslamabad
_b(unpublished)
_c2024
300 _a44 p.
_b: ill.
_c; 30 cm.
_e+CD
500 _aA dissertation submitted in the partial fulfillment of the requirements for the degree of Master of Philosophy in Physics Department of Basic Sciences.
500 _aIncludes bibliographical references.
500 _aThesis supervisor: Dr. Muhammad Waqar Ahmed
502 _aThesis (M.Phil.)--Riphah International University, 2024
546 _aEnglish
650 _aPhysics
_vReactor geometry
_vNumerical model
_vDensity variation
_vPlasma
_vDBS
_vFEAS
942 _cTH