000 00848nam a22001937a 4500
999 _c56102
_d56102
040 _cRiphah International University
082 _a530
_bZOB
100 _aZobia Naeem (41282)
245 _aComputational analysis of SiH2 and SiH3 dynamics in SiH4/H2 capacitive coupled plasma
260 _aIslamabad
_b(unpublished)
_c2024
300 _a, 28 p.
_b: ill.
_c; 30 cm.
_e+CD
500 _aA dissertation submitted in the partial fulfillment of the requirements for the degree of Master of Philosophy in Physics Department of Basic Sciences.
500 _aIncludes bibliographical references
500 _aThesis supervisor: Dr. Muhammad Waqar Ahmed
502 _aThesis (M.Phil.)--Riphah International University, 2024
546 _aEnglish
650 _aPhysics
_vReactor dynamic
_vEnergy model
_vFluid model
_vFlow chart
_vDBS
_vFEAS
942 _cTH