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Foundations of MEMS

Liu, Chang Vaishali B. Mungurwadi

Foundations of MEMS - New Delhi Pearson Education 2017 - 576 p. : ill. ; 24 cm.

Includes index.

ISBN: 9780132497367 (pbk) 9788131764756

Subjects--Topical Terms:
Microelectromechanical systems
Micromechanical systems--Electrostatic sensing--Electrical engineering --Thermal sensing--Magnetic actuation--Polymers Mems--Micro fluidics--FEAS

Dewey Class. No.: 621.3 / LIU

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