Foundations of MEMS (Record no. 20895)

MARC details
000 -LEADER
fixed length control field 00596cam a22001694a 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9780132497367 (pbk)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9788131764756
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.3
Author Mark LIU
100 1# - MAIN ENTRY--PERSONAL NAME
Authorship Liu, Chang
-- Vaishali B. Mungurwadi
245 10 - TITLE STATEMENT
Title Foundations of MEMS
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication New Delhi
Name of publisher Pearson Education
Date of publication 2017
300 ## - PHYSICAL DESCRIPTION
Extent 576 p.
Illustrations : ill.
Dimensions ; 24 cm.
500 ## - GENERAL NOTE
General note Includes index.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Subject Microelectromechanical systems
-- Micromechanical systems
Keywords Electrostatic sensing
-- Electrical engineering
-- Thermal sensing
-- Magnetic actuation
-- Polymers Mems
-- Micro fluidics
-- FEAS
942 ## - ADDED ENTRY ELEMENTS (KOHA)
item type Books
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Source of acquisition Cost, normal purchase price Full call number Barcode Copy number Koha item type
        GULBERG III Lahore GULBERG III Lahore Purchased: Allied Book Company 738.23 621.3 LIU 36223 1 Books
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