Lecture notes on principles of plasma processing
Chen, Francis F. Jane P. Chang
Lecture notes on principles of plasma processing - New York Kluwer Academic/Publishers 2003 - ix, 208 p. : ill. ; 28 cm.
9780306474972 (pbk)
Plasma engineering
Physics--Inelastic collisions--Plasma dynamics--Plasma chemistry--Optical materials--Atomic collisions--Elastic collisions--Nuclear physics --RICAS
539.7092 / CHE
Lecture notes on principles of plasma processing - New York Kluwer Academic/Publishers 2003 - ix, 208 p. : ill. ; 28 cm.
9780306474972 (pbk)
Plasma engineering
Physics--Inelastic collisions--Plasma dynamics--Plasma chemistry--Optical materials--Atomic collisions--Elastic collisions--Nuclear physics --RICAS
539.7092 / CHE