Lecture notes on principles of plasma processing (Record no. 23914)

MARC details
000 -LEADER
fixed length control field 00546cam a22001334a 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9780306474972 (pbk)
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 539.7092
Author Mark CHE
100 1# - MAIN ENTRY--PERSONAL NAME
Authorship Chen, Francis F.
-- Jane P. Chang
245 10 - TITLE STATEMENT
Title Lecture notes on principles of plasma processing
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication New York
Name of publisher Kluwer Academic/Publishers
Date of publication 2003
300 ## - PHYSICAL DESCRIPTION
Extent ix, 208 p.
Illustrations : ill.
Dimensions ; 28 cm.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Subject Plasma engineering
-- Physics
Keywords Inelastic collisions
-- Plasma dynamics
-- Plasma chemistry
-- Optical materials
-- Atomic collisions
-- Elastic collisions
-- Nuclear physics
-- RICAS
942 ## - ADDED ENTRY ELEMENTS (KOHA)
item type Reference
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Source of acquisition Cost, normal purchase price Full call number Barcode Copy number Koha item type
      NOT for LOAN GULBERG III Lahore GULBERG III Lahore Purchased: Pak Book Corporation 16070.68 539.7092 38205 1 Books
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