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Materials science of thin films deposition and structure

By: Material type: TextTextPublication details: Amsterdam Elsevier 2015Description: xxi, 794 p. : ill. ; 23 cmISBN:
  • 9789381269534 (pbk)
Subject(s): DDC classification:
  • 530.4175 OHR
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Includes references, appendix and index.

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