Simulation of Si2Hx density in SiH4/H2 capactive couple plasma

By: Material type: TextTextPublication details: Islamabad (Unpublished) 2022Description: xiii, 59 p. : ill. Col. ; 30 cm. +CDSubject(s): DDC classification:
  • 530 ZAI
Dissertation note: Thesis (M.Phil)--Riphah International University, 2022
List(s) this item appears in: FEAS & DBS Thesis I-14 Campus
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Submitted in partial fulfillment of the requirements for the degree of Master of Philosophy in Physics to the Department of Basic Sciences.

Includes bibliographical references.

Thesis supervisor: Dr. Muhammad Waqar

Thesis (M.Phil)--Riphah International University, 2022

English

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