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Handbook of VLSI microlithography principles, tools, technology and applications

By: Material type: TextTextPublication details: Delhi JAICO Publishing House 2005Description: xix, 957 p. : ill. ; 24 cmISBN:
  • 8179924750 (hb)
Subject(s): DDC classification:
  • 621.381531 HAN
List(s) this item appears in: FEAS G-Books July 2026
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Item type Current library Call number Copy number Status Notes Date due Barcode
Books Books Main Campus 621.381531 HAN (Browse shelf(Opens below)) 1 NOT for LOAN Reference: 4010

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